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磁気渦の研究伝達顕微鏡検査の技術を使用してシリコン窒化膜の磁性ナノ構造の作製

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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

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磁気渦の研究伝達顕微鏡検査の技術を使用してシリコン窒化膜の磁性ナノ構造の作製

7,738 Views

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06:27 min

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July 02, 2018

DOI:

10.3791/57817-v

DOI:

10.3791/57817-v

•

06:27 min

July 02, 2018

•

1 Views

Meena Dhankhar, Marek Vaňatka, Michal Urbanek

¹CEITEC BUT,Brno University of Technology

Tags

Magnetic Nanostructures Silicon Nitride Membranes Transmission Microscopy Electron Beam Lithography Electron Beam Evaporation Permalloy Deposition Lift-off Process

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