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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
JoVE 杂志
工程学
This content is Free Access.
JoVE 杂志 工程学
Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

DOI:
10.3791/57817-v

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06:27 min

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July 02, 2018

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, ,
1CEITEC BUT,Brno University of Technology

Chapters

  • 00:04Title
  • 00:40Substrate Preparation, Spin Coating, and Electron-beam Lithography
  • 01:52Chemical Development and Electron Beam Evaporation
  • 03:08Lift-off
  • 03:36LTEM Imaging
  • 04:41Results: Transmission Electron Microscopy of Magnetic Nanostructures on Silicon Nitride Membranes
  • 05:45Conclusion

Summary

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A protocol for the fabrication of magnetic micro- and nanostructures with spin configurations forming magnetic vortices suitable for transmission electron microscopy (TEM) and magnetic transmission x-ray microscopy (MTXM) studies is presented.

Tags

Magnetic NanostructuresSilicon Nitride MembranesTransmission MicroscopyElectron Beam LithographyElectron Beam EvaporationPermalloy DepositionLift-off Process

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