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用透射显微技术制备氮化硅薄膜磁性纳米结构的研究

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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

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用透射显微技术制备氮化硅薄膜磁性纳米结构的研究

7,738 Views

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06:27 min

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July 02, 2018

DOI:

10.3791/57817-v

DOI:

10.3791/57817-v

•

06:27 min

July 02, 2018

•

1 Views

Meena Dhankhar, Marek Vaňatka, Michal Urbanek

¹CEITEC BUT,Brno University of Technology

Tags

Magnetic Nanostructures Silicon Nitride Membranes Transmission Microscopy Electron Beam Lithography Electron Beam Evaporation Permalloy Deposition Lift-off Process

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