Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.
Cataldo, G., Barrentine, E. M., Brown, A. D., Moseley, S. H., U-Yen, K., Wollack, E. J. Fabrication and Characterization of Superconducting Resonators. J. Vis. Exp. (111), e53868, doi:10.3791/53868 (2016).