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化学溶液沉积在硅外延大孔石英薄膜的制备
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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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化学溶液沉积在硅外延大孔石英薄膜的制备

9,170 Views

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07:37 min

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December 21, 2015

DOI:

10.3791/53543-v

DOI:
10.3791/53543-v

•

07:37 min
December 21, 2015

•

12 Views
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1Institut des Nanotechnologies de Lyon,CNRS-École Centrale de Lyon, 2Institut de Ciència de Materials de Barcelona,Consejo Superior de Investigaciones Científicas

Summary

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A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

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MacroporousEpitaxialQuartzFilmsSiliconChemical Solution DepositionSol-gelTetraethyl OrthosilicateStrontiumCTABMesoporousThermal TreatmentCrystallizationEpitaxial Growth

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Cite this Article

Carretero-Genevrier, A., Gich, M. Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition. J. Vis. Exp. (106), e53543, doi:10.3791/53543 (2015).

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