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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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December 21, 2015
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概要
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A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.
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Carretero-Genevrier, A., Gich, M. Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition. J. Vis. Exp. (106), e53543, doi:10.3791/53543 (2015).
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