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Herstellung von räumlich getrennter komplexe Oxide
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Fabrication of Spatially Confined Complex Oxides
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Herstellung von räumlich getrennter komplexe Oxide

9,331 Views

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08:45 min

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July 01, 2013

DOI:

10.3791/50573-v

DOI:
10.3791/50573-v

•

08:45 min
July 01, 2013

•

1 Views
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1Materials Science and Technology Division,Oak Ridge National Laboratory, 2Department of Physics & Astronomy,University of Tennessee, Knoxville

Summary

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Wir beschreiben die Verwendung von Pulsed Laser Deposition (PLD), Photolithographie und Draht-Bonding-Techniken, um komplexe Oxide Mikrometerskala Geräte zu erstellen. Die PLD wird genutzt, um epitaktischen dünnen Schichten wachsen. Photolithographie und Draht-Bonding-Techniken eingeführt, um praktische Geräte zur Messung Zwecke erstellen.

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Cite this Article

Guo, H., Ward, T. Z. Fabrication of Spatially Confined Complex Oxides. J. Vis. Exp. (77), e50573, doi:10.3791/50573 (2013).

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