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Chapters
- 00:05Title
- 01:30Substrate Preparation
- 02:01Laser Alignment and Selection of Laser Parameters
- 03:33Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
- 04:51Calibration of the Film Thickness
- 05:58Deposition of Compact AZO Films
- 07:25Deposition of Hierarchically Structured AZO Films
- 08:08Results: Compact and Forest-like AZO Films and Their Properties
- 09:39Conclusion
Wir beschreiben die experimentelle Methode nanostrukturierte Oxid Dünnschichten durch Nanosekunde Pulsed Laser Deposition (PLD) abzuscheiden in Gegenwart von einem Hintergrund Gas. Mit dieser Methode Al-dotiertem ZnO (AZO) Filmen, von kompakt bis hierarchisch nano-Baum Wälder strukturiert werden können hinterlegt.
