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Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

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Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

DOI:

10.3791/201298-v

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03:39 min

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May 17, 2024

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Keywords: Radio Frequency Magnetron Sputtering Bi2Te3 Sb2Te3 Thermoelectric Thin Films Glass Substrates Aluminum Shield Magnetron Holder Vacuum Chamber Pressure Gauge Cooler System Argon Gas Flow Rotation Speed Automatic Matching Network Controller Radio Frequency Power Supply Plasma

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Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

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