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アトミックトレーサブルナノ構造作製
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Atomically Traceable Nanostructure Fabrication
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アトミックトレーサブルナノ構造作製

8,555 Views

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12:35 min

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July 17, 2015

DOI:

10.3791/52900-v

DOI:
10.3791/52900-v

•

12:35 min
July 17, 2015

•

1 Views
, , , , , , , , , , , , , , , ,
1Zyvex Labs, 2Department of Physics,University of Texas at Dallas, 3Department of Materials Science and Engineering,University of Texas at Dallas, 4Materials Science and Engineering,University of North Texas, 5National Institute of Standards and Technology

Summary

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We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

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Cite this Article

Ballard, J. B., Dick, D. D., McDonnell, S. J., Bischof, M., Fu, J., Owen, J. H. G., Owen, W. R., Alexander, J. D., Jaeger, D. L., Namboodiri, P., Fuchs, E., Chabal, Y. J., Wallace, R. M., Reidy, R., Silver, R. M., Randall, J. N., Von Ehr, J. Atomically Traceable Nanostructure Fabrication. J. Vis. Exp. (101), e52900, doi:10.3791/52900 (2015).

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