Scanning-probe single-electron capacitance spectroscopy facilitates the study of single-electron motion in localized subsurface regions. A sensitive charge-detection circuit is incorporated into a cryogenic scanning probe microscope to investigate small systems of dopant atoms beneath the surface of semiconductor samples.
Walsh, K. A., Romanowich, M. E., Gasseller, M., Kuljanishvili, I., Ashoori, R., Tessmer, S. Scanning-probe Single-electron Capacitance Spectroscopy. J. Vis. Exp. (77), e50676, doi:10.3791/50676 (2013).