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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
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工学
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JoVE Journal 工学
Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

11,530 Views

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10:49 min

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January 23, 2013

DOI:

10.3791/50177-v

DOI:
10.3791/50177-v

•

10:49 min
January 23, 2013

•

2 Views
, , , , ,
1Institute of Microengineering (IMT), Photovoltaics and Thin Film Electronics Laboratory,Ecole Polytechnique Fédérale de Lausanne (EPFL), 2Department of Electrical Engineering and Computer Sciences,University of California, Berkeley

概要

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We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes.

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Cite this Article

Battaglia, C., Söderström, K., Escarré, J., Haug, F., Despeisse, M., Ballif, C. Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting. J. Vis. Exp. (71), e50177, doi:10.3791/50177 (2013).

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