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マイクロ波光伝導減衰法による半導体中のキャリアライフタイム測定

Journal JoVE
Ingénierie

This content is Free Access.

Journal JoVE Ingénierie

Carrier Lifetime Measurements in Semiconductors through the Microwave Photoconductivity Decay Method

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マイクロ波光伝導減衰法による半導体中のキャリアライフタイム測定

27,058 Views

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07:38 min

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April 18, 2019

DOI:

10.3791/59007-v

DOI:

10.3791/59007-v

•

07:38 min

April 18, 2019

•

61 Views

Takato Asada¹, Yoshihito Ichikawa¹, Masashi Kato^1,2

¹Department of Electrical & Mechanical Engineering,Nagoya Institute of Technology, ²Frontier Research Institute for Material Science,Nagoya Institute of Technology

Summary

半導体の重要な物理パラメーターのひとつとして、キャリアの寿命をマイクロ波光伝導減衰法を用いたプロトコル経由で本測定します。

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