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Kompakt Lens mindre Digital Holographic Mikroskop för MEMS inspektion och karakterisering
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Chapitres
- 00:05Titre
- 01:05Preparations
- 03:52Data Acquisition
- 05:38Data Analysis for Static Measurements
- 06:40Sample Preparation and Data Analysis for Dynamic Measurements
- 07:42Results: CDHM Compared to Atomic Force Microscopy and Other Results
- 09:17Conclusion
Vi presenterar en kompakt reflektion digitala holografiska systemet (CDHM) för inspektion och karakterisering av MEMS-enheter. En lins-mindre design med en divergerande ingång våg ger naturlig geometrisk förstoring visas. Både statiska och dynamiska studier presenteras.
Tags
Compact Lens-less Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationOptical Full-field MeasurementsComputational TechniquesExperimental TechniquesSemiconductor IndustryMechanical PropertiesManufacturing StagesNon-contactReal-timeHigh-resolution3D MapReflective ObjectWafer InspectionOptics Reference TestingTransparent GeometryMicro-optics InspectionDiffractive Optics InspectionBioimagingCompact Digital Holographic Microscope (CDHM)Silicon Wafer CharacterizationGold Electrodes
