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3D碳微机电系统（C-MEMS）的制造

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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Please note that all translations are automatically generated. Click here for the English version.

3D碳微机电系统（C-MEMS）的制造

DOI:

10.3791/55649-v

•

08:01 min

•

June 17, 2017

•

Bidhan Pramanick, Sergio O. Martinez-Chapa, Marc Madou², Hyundoo Hwang³

¹School of Engineering and Sciences,Tecnologico de Monterrey, ²Department of Mechanical and Aerospace Engineering,University of California, ³BBB Inc

Kapitel

00:05Titel
01:473D Polymer-based Carbon Structure Fabrication
05:123D Human Hair-derived Carbon Structure Fabrication
06:19Results: Human Hair-derived 3D Carbon Microstructures
07:21Conclusion

Summary

Automatische Übersetzung

基于天然产物，人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是：（i）富碳聚合物前体的光刻和（ii）图案化聚合物前体的热解。

Tags

3D Carbon Microelectromechanical Systems (C-MEMS)Carbon Microelectromechanical Systems Polymer Precursor Carbon Fabrication Carbon Structures Isometric Shrinkage Carbon Allotropes Graphitic Diamond-like Glassy Carbon Polymer Structure Fabrication Spin Coating Photoresist Photolithography

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