/
/
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Zum Anzeigen dieser Inhalte ist ein JoVE-Abonnement erforderlich. Melden Sie sich an oder starten Sie Ihre kostenlose Testversion.
Kapitel
- 00:05Titel
- 01:05Preparations
- 03:52Data Acquisition
- 05:38Data Analysis for Static Measurements
- 06:40Sample Preparation and Data Analysis for Dynamic Measurements
- 07:42Results: CDHM Compared to Atomic Force Microscopy and Other Results
- 09:17Conclusion
We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.
Tags
Compact Lens-less Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationOptical Full-field MeasurementsComputational TechniquesExperimental TechniquesSemiconductor IndustryMechanical PropertiesManufacturing StagesNon-contactReal-timeHigh-resolution3D MapReflective ObjectWafer InspectionOptics Reference TestingTransparent GeometryMicro-optics InspectionDiffractive Optics InspectionBioimagingCompact Digital Holographic Microscope (CDHM)Silicon Wafer CharacterizationGold Electrodes
