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Micropunching Litografi för att generera Micro-och submikron-mönster på polymersubstrat

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Ingenieurwesen

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JoVE Journal Ingenieurwesen

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates

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Micropunching Litografi för att generera Micro-och submikron-mönster på polymersubstrat

14,861 Views

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09:24 min

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July 02, 2012

DOI:

DOI:

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09:24 min

July 02, 2012

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13 Views

Anirban Chakraborty, Xinchuan Liu, Cheng Luo

¹Mechanical and Aerospace Engineering,University of Texas at Arlington

Tags

Micropunching Lithography Generating Micro- And Submicron-patterns Polymer Substrates Conducting Polymers Lithographic Techniques Technical Challenges Photolithographic Methods Wet Etching Dry Etching Micro/nanosystems Planar Form Sidewall Patterns 3-D Circuits Fluidic Channels Horizontal Growth Of Nanowires And Nanotubes Macropunching Method

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