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Microscopia a forza atomica con sonda attiva con array a sbalzo Quattro-Parallel per l'ispezione di campioni su larga scala ad alta produttività
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01:24 min
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June 13, 2023
DOI:
1Mechatronics Research Lab, Department of Mechanical Engineering,Massachusetts Institute of Technology, 2Mechatronics Group, Department of Mechanical Engineering,Ilmenau University of Technology, 3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 5nano analytik GmbH
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Cite this Article
Xia, F., Youcef-Toumi, K., Sattel, T., Manske, E., Rangelow, I. W. Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection. J. Vis. Exp. (196), e65210, doi:10.3791/65210 (2023).
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