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Journal
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Ingenieurwesen
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Parallel Active Cantilever Arrays in AFMS to Enable High-Throughput Inspections
/
Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays
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JoVE Journal
Ingenieurwesen
Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays
Parallel Active Cantilever Arrays in AFMS to Enable High-Throughput Inspections
DOI:
10.3791/65210-v
•
01:24 min
•
June 13, 2023
•
Fangzhou Xia
,
Kamal Youcef-Toumi
,
Thomas Sattel
,
Eberhard Manske
,
Ivo W. Rangelow
5
1
Mechatronics Research Lab, Department of Mechanical Engineering
,
Massachusetts Institute of Technology
,
2
Mechatronics Group, Department of Mechanical Engineering
,
Ilmenau University of Technology
,
3
Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology
,
Ilmenau University of Technology
,
4
Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology
,
Ilmenau University of Technology
,
5
nano analytik GmbH
Tags
Active Probe
Atomic Force Microscopy
Cantilever Arrays
High-throughput
Large-scale Sample Inspection
Scanning Probe Microscopy
MEMS Probes
Piezoresistive Sensors
Thermomechanical Actuators
Parallel SPM Imaging
High-speed Multichannel Electronics
Nanoscale Surface Studies
Nanofabricated Structures
Semiconductor Wafers
Data-driven Post-processing
Defect Detection
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Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays
Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM
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