/
/
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
A subscription to JoVE is required to view this content. Sign in or start your free trial.
6,008 Views
•
15:25 min
•
February 04, 2018
DOI:
Summary
Automatically generated
A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.
Read Article
Cite this Article
Goktas, H. Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters. J. Vis. Exp. (132), e56371, doi:10.3791/56371 (2018).
Copy