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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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February 04, 2018
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A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.
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Goktas, H. Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters. J. Vis. Exp. (132), e56371, doi:10.3791/56371 (2018).
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