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Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering
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Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
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JoVE Journal Mühendislik
Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

DOI:
10.3791/66248-v

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00:45 min

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May 17, 2024

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, , , , ,
1Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology,Universiti Sains Islam Malaysia

Etiketler

Bi2Te3Sb2Te3Thermoelectric Thin FilmsRadio Frequency Magnetron SputteringThin Film DepositionWaste Heat RecoveryThermoelectric GeneratorsN-typeP-type

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Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

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