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Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering
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Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
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JoVE Journal 工学
Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

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00:45 min

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May 17, 2024

DOI:

10.3791/66248-v

DOI:
10.3791/66248-v

•

00:45 min
May 17, 2024

•

74 Views
, , , , ,
1Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology,Universiti Sains Islam Malaysia

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Ahmad Musri, N., Putthisigamany, Y., Chelvanathan, P., Ahmad Ludin, N., Md Yatim, N., Syafiq, U. Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique. J. Vis. Exp. (207), e66248, doi:10.3791/66248 (2024).

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