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Journal / Engineering / 基于溶剂蒸发的孔隙率控制技术提高软电容式压力传感器的灵敏度…
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基于溶剂蒸发的孔隙率控制技术提高软电容式压力传感器的灵敏度
 
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基于溶剂蒸发的孔隙率控制技术提高软电容式压力传感器的灵敏度

Article DOI: 10.3791/65143-v • 10:28 min • March 24th, 2023
March 24th, 2023 •
1, 1, 1, 1, 1
1State Key Laboratory of Industrial Control Technology, College of Control Science and Engineering, Zhejiang University

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提出了一种基于溶剂蒸发技术的简单且具有成本效益的制造方法，以优化软电容式压力传感器的性能，该方法通过使用不同质量比的模塑PDMS/甲苯溶液在介电层中的孔隙率控制来实现。

Tags

工程，第193期，软电容式压力传感器，溶剂蒸发，孔隙率控制，微结构，弹性导体
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