Journal
/
Química
/
Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
JoVE Journal
Química
É necessária uma assinatura da JoVE para visualizar este conteúdo.  Faça login ou comece sua avaliação gratuita.
JoVE Journal Química
Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate

DOI:
10.3791/59929-v

•

08:23 min

•

September 28, 2019

•

, , , , ,
1Chemistry Department,Federal University of São Carlos (UFSCAR), 2Physics Department, School of Sciences,São Paulo State University (UNESP)

Capítulos

  • 00:04Título
  • 00:47Niobium Oxide Film Deposition
  • 03:55Solar Cell Construction
  • 05:46Results: The Effects of Oxygen Flow Rates on Reactive Sputtering
  • 07:23Conclusion

Summary

Tadução automática

Tadução automática

Here, we present a protocol for niobium oxide films deposition by reactive sputtering with different oxygen flow rates for use as an electron transport layer in perovskite solar cells.

Tags

Reactive SputteringNiobium Oxide FilmsOxygen Flow RateThin Film DepositionSubstrate PreparationSputtering Process ParametersFilm ThicknessPlasma CleaningImpedance Matching

Article

Embed

ADICIONAR À PLAYLIST

Usage Statistics

Vídeos Relacionados

Atomically Defined Templates for Epitaxial Growth of Complex Oxide Thin Films

Fabrication of Large-area Free-standing Ultrathin Polymer Films

Unraveling Entropic Rate Acceleration Induced by Solvent Dynamics in Membrane Enzymes

Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Dissolution Dynamic Nuclear Polarization Instrumentation for Real-time Enzymatic Reaction Rate Measurements by NMR

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

Reactive Vapor Deposition of Conjugated Polymer Films on Arbitrary Substrates

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing

Read Article