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ワンステップ連続湿式エッチング法によって異なる幾何学的なセクションのポリジメチルシロキサン マイクロ流路の加工方法
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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
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ワンステップ連続湿式エッチング法によって異なる幾何学的なセクションのポリジメチルシロキサン マイクロ流路の加工方法

9,588 Views

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08:31 min

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September 13, 2018

DOI:

10.3791/57868-v

DOI:
10.3791/57868-v

•

08:31 min
September 13, 2018

•

1 Views
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1Research Center for Applied Sciences,Academia Sinica, 2Department of Civil Engineering,Tamkang University, 3College of Engineering,Chang Gung University

Tags

Microfluidic ChannelsPolydimethylsiloxane (PDMS)One-step FabricationSequential Wet EtchingGeometric Cross SectionsChannel FabricationMicrofluidic Device ManufacturingComplex Microfluidic SystemsMaster MoldPDMS MoldingOxygen Plasma Treatment

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Wang, C., Liao, W., Wu, H., Tung, Y. One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes. J. Vis. Exp. (139), e57868, doi:10.3791/57868 (2018).

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