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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
 

One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes

Article DOI: 10.3791/57868-v • 08:31 min • September 13th, 2018
September 13th, 2018 •
1,2, 1, 1, 1,3
1Research Center for Applied Sciences, Academia Sinica, 2Department of Civil Engineering, Tamkang University, 3College of Engineering, Chang Gung University

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Several methods are available for the fabrication of channels of non-rectangular sections embedded in polydimethylsiloxane microfluidic devices. Most of them involve multistep manufacturing and extensive alignment. In this paper, a one-step approach is reported for fabricating microfluidic channels of different geometric cross sections by polydimethylsiloxane sequential wet etching.

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Fabrication Polydimethylsiloxane (PDMS) Microfluidic Channels Geometric Sections Wet Etching Processes Fabrication Techniques Manufacturing Polycarbonate Microfluidic Device One-step Approach Sequential Wet Etching Tedious Procedures Extensive Alignments Complex Microfluidic Systems Non-rectangular Sections Various Heights Microenvironment Conditions Flux Distribution Mixture Of Substance In Channels Master Mold Negative Mold Photoresist Silicon Wafer Computer-aided Design (CAD) Inverted Topology Channel Layouts PDMS And Its Catalyst Plastic Cup Power Stirrer Homogenous Mixture Desiccator Vacuum Pump
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