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Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
JoVE Journal
Engineering
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JoVE Journal Engineering
Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

DOI:
10.3791/53861-v

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10:14 min

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March 06, 2016

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, , , ,
1NSF Research Triangle Materials Research Science and Engineering Center,Duke University, 2Department of Biomedical Engineering,Duke University, 3Department of Mechanical Engineering and Materials Science,Duke University

Chapters

  • 00:05Title
  • 00:57Photolithography
  • 02:13Deep Reactive Ion Etching
  • 02:55Piranha Cleaning
  • 03:46Anodic Bonding
  • 05:41Finalizing the Acoustofluidic Device
  • 06:44Operating the Acoustofluidic Device
  • 08:01Results: Acoustofluidic Devices Support Bulk Acoustic Standing Waves
  • 09:03Conclusion

Summary

Automatic Translation

Automatic Translation

Acoustofluidic devices use ultrasonic waves within microfluidic channels to manipulate, concentrate and isolate suspended micro and nanoscopic entities. This protocol describes the fabrication and operation of such a device supporting bulk acoustic standing waves to focus particles in a central streamline without the aid of sheath fluids.

Tags

Keywords: Acoustofluidic DevicesBulk Acoustic Standing WavesSheathless Particle FocusingMicrofabricationPhotolithographyDeep Reactive Ion EtchingSilicon Wafer Processing

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