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浓稠钇铁石榴石薄膜的形成使用气溶胶沉积
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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
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浓稠钇铁石榴石薄膜的形成使用气溶胶沉积

9,032 Views

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10:52 min

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May 15, 2015

DOI:

10.3791/52843-v

DOI:
10.3791/52843-v

•

10:52 min
May 15, 2015

•

4 Views
, , ,
1Power Electronics Branch,Naval Research Laboratory, 2Physics of Electronic Materials Branch,Naval Research Laboratory

Summary

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本报告描述了使用定制系统来在RT执行的钇铁石榴石厚膜的气溶胶沉积在蓝宝石衬底。使用扫描电子显微镜，轮廓，和铁磁谐振得到的技术的功能的代表性概述淀积膜的特征在于。

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Cite this Article

Johnson, S. D., Glaser, E. R., Kub, F. J., Eddy, Jr., C. R. Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition. J. Vis. Exp. (99), e52843, doi:10.3791/52843 (2015).

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