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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
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May 15, 2015
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This report describes the use of a custom-built system to perform aerosol deposition of thick films of yttrium iron garnet onto sapphire substrates at RT. The deposited films are characterized using scanning electron microscopy, profilometry, and ferromagnetic resonance to give a representative overview of the capabilities of the technique.
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Johnson, S. D., Glaser, E. R., Kub, F. J., Eddy, Jr., C. R. Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition. J. Vis. Exp. (99), e52843, doi:10.3791/52843 (2015).
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