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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
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JoVE 杂志 工程学
Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

DOI:
10.3791/52843-v

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10:52 min

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May 15, 2015

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, , ,
1Power Electronics Branch,Naval Research Laboratory, 2Physics of Electronic Materials Branch,Naval Research Laboratory

Chapters

  • 00:05Title
  • 01:42Aerosol Deposition Equipment and Experiment Preparation
  • 04:51Establishing the Pressure Gradient and Collecting Data
  • 08:44Results: Morphology and Properties of an Aerosol Deposition Film of YIG on a Sapphire Substrate
  • 10:26Conclusion

Summary

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This report describes the use of a custom-built system to perform aerosol deposition of thick films of yttrium iron garnet onto sapphire substrates at RT. The deposited films are characterized using scanning electron microscopy, profilometry, and ferromagnetic resonance to give a representative overview of the capabilities of the technique.

Tags

Keywords: Aerosol DepositionYttrium Iron GarnetThick Film DepositionHigh-density FilmsFerromagnetic ResonanceScanning Electron MicroscopyFilm Characterization

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