Journal
/
공학
/
Real-Time DC-dynamische Biasing Methode voor het omschakelen Tijd Verbetering Ernstig Underdamped Fringing-veld elektrostatische MEMS Aandrijvingen
JoVE 신문
공학
JoVE 비디오를 활용하시려면 도서관을 통한 기관 구독이 필요합니다.  전체 비디오를 보시려면 로그인하거나 무료 트라이얼을 시작하세요.
JoVE 신문 공학
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Please note that all translations are automatically generated. Click here for the English version.

Real-Time DC-dynamische Biasing Methode voor het omschakelen Tijd Verbetering Ernstig Underdamped Fringing-veld elektrostatische MEMS Aandrijvingen

10,150 Views

•

11:44 min

•

August 15, 2014

DOI:

10.3791/51251-v

DOI:
10.3791/51251-v

•

11:44 min
August 15, 2014

•

1 Views
, , , ,
1Department of Electrical and Computer Engineering,University of California, Davis, 2Digital Light Projection (DLP) Technology Development,Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering,Purdue University

Tags

Real-time DC-dynamic BiasingSwitching Time ImprovementUnderdamped Fringing-field Electrostatic MEMS ActuatorsFast Switching OperationSettling TimeTransient Applied Bias WaveformsMechanical Quality FactorSubstrate RemovalReliabilityStictionCharge PumpCMOS ProcessingExperimental ValidationSwitching Time Improvement

Read Article

Cite this Article

Small, J., Fruehling, A., Garg, A., Liu, X., Peroulis, D. Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators. J. Vis. Exp. (90), e51251, doi:10.3791/51251 (2014).

Download .ris file

Copy

Share Video

.

Copy