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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Ingénierie
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

9,718 Views

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10:25 min

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September 14, 2018

DOI:

10.3791/58272-v

DOI:
10.3791/58272-v

•

10:25 min
September 14, 2018

•

2 Views
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1Center for Functional Nanomaterials,Brookhaven National Laboratory

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Camino, F. E., Manfrinato, V. R., Stein, A., Zhang, L., Lu, M., Stach, E. A., Black, C. T. Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope. J. Vis. Exp. (139), e58272, doi:10.3791/58272 (2018).

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