/

/

3D碳微机电系统（C-MEMS）的制造

JoVE Revista
Ingeniería

Se requiere una suscripción a JoVE para ver este contenido. Inicie sesión o comience su prueba gratuita.

JoVE Revista Ingeniería

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Please note that all translations are automatically generated. Click here for the English version.

3D碳微机电系统（C-MEMS）的制造

DOI:

10.3791/55649-v

•

08:01 min

•

June 17, 2017

•

Bidhan Pramanick, Sergio O. Martinez-Chapa, Marc Madou², Hyundoo Hwang³

¹School of Engineering and Sciences,Tecnologico de Monterrey, ²Department of Mechanical and Aerospace Engineering,University of California, ³BBB Inc

Capítulos

00:05Título
01:473D Polymer-based Carbon Structure Fabrication
05:123D Human Hair-derived Carbon Structure Fabrication
06:19Results: Human Hair-derived 3D Carbon Microstructures
07:21Conclusion

Summary

Traducción Automática

基于天然产物，人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是：（i）富碳聚合物前体的光刻和（ii）图案化聚合物前体的热解。

Tags

3D Carbon Microelectromechanical Systems (C-MEMS)Carbon Microelectromechanical Systems Polymer Precursor Carbon Fabrication Carbon Structures Isometric Shrinkage Carbon Allotropes Graphitic Diamond-like Glassy Carbon Polymer Structure Fabrication Spin Coating Photoresist Photolithography

Article

Embed

Añadir a la lista de reproducción

Usage Statistics

Videos relacionados

制备，致密，副本三维碳纳米管微结构成型

High-resolution, High-speed, Three-dimensional Video Imaging with Digital Fringe Projection Techniques

低温碳纳米管垂直互连的制作兼容半导体技术

制备与表征超导谐振器的

高炉矿渣的双向稳定物价：沉淀碳酸钙和沸石重金属吸附剂的合成

通过纳米氧化钇稳定的二氧化锆（YSZ）的支架的高温加工<em>原位</em>碳模板干凝胶

真空沉积有机发光二极管的生产与表征

大型单层矩形 SnSe 片的常压制备

多材料陶瓷基元器件--用热塑性3d 印刷 (ceram-t3dp) 制备黑白氧化锆部件的添加剂

金属陶瓷元件的熔融长丝制造 (fff)

Read Article