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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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May 23, 2018
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Thin films (100-1000 Å) of vanadium dioxide (VO2) were created by atomic-layer deposition (ALD) on sapphire substrates. Following this, the optical properties were characterized through the metal-insulator transition of VO2. From the measured optical properties, a model was created to describe the tunable refractive index of VO2.
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Currie, M., Mastro, M. A., Wheeler, V. D. Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model. J. Vis. Exp. (135), e57103, doi:10.3791/57103 (2018).
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