Journal
/
化学
/
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
JoVE 杂志
化学
This content is Free Access.
JoVE 杂志 化学
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

1,405 Views

•

07:10 min

•

April 29, 2020

DOI:

10.3791/61065-v

DOI:
10.3791/61065-v

•

07:10 min
April 29, 2020

•

3 Views
, , , ,
1Łukasiewicz Research Network-Institute of Electronic Materials Technology

Explore More Videos

3D Depth ProfileSegregated ImpuritiesSecondary Ion Mass SpectrometrySemiconductor TechnologyStructural DefectsEutectic MixtureDefect-selective EtchingGallium NitrideScanning Electron MicroscopySIMS Calibration

Read Article

Cite this Article

Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).

Download .ris file

Copy

Share Video

.

Copy