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합성 및 플라즈마에 의해 높은 c 축 된 ZnO 박막의 특성은 화학 기상 증착 시스템과 자외선 광 검출기 응용 프로그램 강화
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October 03, 2015
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We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.
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Chao, C., Wei, D. Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application. J. Vis. Exp. (104), e53097, doi:10.3791/53097 (2015).
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