Journal
/
工程学
/
Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds
JoVE 杂志
工程学
需要订阅 JoVE 才能查看此.  登录或开始免费试用。
JoVE 杂志 工程学
Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds

Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds

DOI:
10.3791/50770-v

•

09:45 min

•

December 02, 2013

•

, , , ,
1Institute of Chemistry,The Hebrew University of Jerusalem, 2Center for Nanoscience and Nanotechnology,The Hebrew University of Jerusalem

Chapters

  • 00:05Title
  • 01:32Surface Cleaning
  • 02:50Monolayer Formation
  • 03:43Nanowire Synthesis
  • 05:02Nanowire Drop-casting onto Substrate and Rapid Thermal Anneal
  • 06:24Sheet Resistance Measurements, Nanowire Device Fabrication and Characterization
  • 08:03Results: Sheet Resistance Measurements and Nanowire FET I-V Curves Using Monolayer Contact Doped Materials
  • 09:08Conclusion

Summary

自动翻译

自动翻译

A detailed procedure for surface doping of Silicon interfaces is provided. The ultra-shallow surface doping is demonstrated by using phosphorus containing monolayers and rapid annealing process. The method can be used for doping of macroscopic area surfaces as well as nanostructures.

Tags

Monolayer Contact DopingSilicon SurfacesSilicon NanowiresOrganophosphorus CompoundsUltra-shallow Doping ProfilesTetraethyl MethylenediphosphonateVapor-liquid-solid (VLS) MechanismNanowire Field-effect Transistor (NW-FET)

Article

Embed

添加到播放列表

Usage Statistics

Related Videos

Probing and Mapping Electrode Surfaces in Solid Oxide Fuel Cells

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Ultrahigh Density Array of Vertically Aligned Small-molecular Organic Nanowires on Arbitrary Substrates

Analysis of Contact Interfaces for Single GaN Nanowire Devices

Evaluating Plasmonic Transport in Current-carrying Silver Nanowires

Preparation and Use of Photocatalytically Active Segmented Ag|ZnO and Coaxial TiO2-Ag Nanowires Made by Templated Electrodeposition

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

Resonance Raman Spectroscopy of Extreme Nanowires and Other 1D Systems

Scanning SQUID Study of Vortex Manipulation by Local Contact

Monovalent Cation Doping of CH3NH3PbI3 for Efficient Perovskite Solar Cells

Read Article