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原子層堆積法を介してゲルマニウム上のペロブスカイト型チタン酸ストロンチウムのエピタキシャル成長
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JoVE Journal Chemistry
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
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原子層堆積法を介してゲルマニウム上のペロブスカイト型チタン酸ストロンチウムのエピタキシャル成長

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09:45 min

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July 26, 2016

DOI:

10.3791/54268-v

DOI:
10.3791/54268-v

•

09:45 min
July 26, 2016

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1 Views
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1McKetta Department of Chemical Engineering,The University of Texas at Austin

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Epitaxial GrowthPerovskiteStrontium TitanateGermaniumAtomic Layer DepositionMicroelectronicsDielectricCrystalline OxidesInterface StatesManufacturingPrecursorsMolecular Beam EpitaxySubstrate CleaningUV Ozone CleaningVacuum System

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Lin, E. L., Edmondson, B. I., Hu, S., Ekerdt, J. G. Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition. J. Vis. Exp. (113), e54268, doi:10.3791/54268 (2016).

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