'Dergi'
/
Kimya
/
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
JoVE Journal
Kimya
'Bu içeriği görüntülemek için JoVE aboneliği gereklidir.'  'Oturum açın veya ücretsiz deneme sürümünü başlatın.'
JoVE Journal Kimya
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

DOI:
10.3791/54268-v

•

09:45 min

•

July 26, 2016

•

, , ,
1McKetta Department of Chemical Engineering,The University of Texas at Austin

'Bölümler'

  • 00:05'Başlık'
  • 01:20Cleaning the Germanium Substrate
  • 02:46Loading to the Vacuum System and Germanium Deoxidization
  • 04:30Thin Film ALD Growth and Annealing of the Strontium Titanate (STO) Film
  • 07:23Results: RHEED and X-ray Diffraction Analysis
  • 08:41Conclusion

Özet

'Otomatik Çeviri'

'Otomatik Çeviri'

This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.

'Etiketler'

Epitaxial GrowthPerovskiteStrontium TitanateGermaniumAtomic Layer DepositionMicroelectronicsDielectricCrystalline OxidesInterface StatesManufacturingPrecursorsMolecular Beam EpitaxySubstrate CleaningUV Ozone CleaningVacuum System

Article

Embed

'ÇALMA LİSTESİNE EKLE'

Usage Statistics

'İlgili Videolar'

Atomically Defined Templates for Epitaxial Growth of Complex Oxide Thin Films

Synthesis and Reaction Chemistry of Nanosize Monosodium Titanate

Layer-by-layer Synthesis and Transfer of Freestanding Conjugated Microporous Polymer Nanomembranes

Improved Heterojunction Quality in Cu2O-based Solar Cells Through the Optimization of Atmospheric Pressure Spatial Atomic Layer Deposited
Zn1-xMgxO

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Influence of Hybrid Perovskite Fabrication Methods on Film Formation, Electronic Structure, and Solar Cell Performance

Reactive Vapor Deposition of Conjugated Polymer Films on Arbitrary Substrates

Deposition of Porous Sorbents on Fabric Supports

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

Synthesis of Substrate-Bound Au Nanowires Via an Active Surface Growth Mechanism

Read Article