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集中太陽光発電システムにおけるスペクトル分割分散素子の高コントラスト回折格子の作製
JoVE Journal
Engineering
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JoVE Journal Engineering
Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

集中太陽光発電システムにおけるスペクトル分割分散素子の高コントラスト回折格子の作製

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12:08 min

July 18, 2015

DOI:

12:08 min
July 18, 2015

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Summary

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The fabrication of high contrast gratings as the parallel spectrum splitting dispersive element in a concentrated photovoltaic system is demonstrated. Fabrication processes including nanoimprint lithography, TiO2 sputtering and reactive ion etching are described. Reflectance measurement results are used to characterize the optical performance.

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