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Instrumentkalibratie, experimentele opstelling en parameterafstemming voor de topografie van het halfgeleiderwafeltje met AFM
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June 13, 2023
DOI:
1Mechatronics Research Lab, Department of Mechanical Engineering,Massachusetts Institute of Technology, 2Mechatronics Group, Department of Mechanical Engineering,Ilmenau University of Technology, 3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 5nano analytik GmbH
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Xia, F., Youcef-Toumi, K., Sattel, T., Manske, E., Rangelow, I. W. Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM. J. Vis. Exp. (Pending Publication), e200439, doi:10.3791/200439 (2023).
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