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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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JoVE Journal Mühendislik
Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

10,803 Views

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07:50 min

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July 17, 2015

DOI:

10.3791/52745-v

DOI:
10.3791/52745-v

•

07:50 min
July 17, 2015

•

9 Views
, , , ,
1Department of Materials Science and Engineering,The Ohio State University, 2Elektrik ve Bilgisayar Mühendisliği Bölümü,The Ohio State University, 3Institute of Materials Research,The Ohio State University

Özet

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The use of electron channeling contrast imaging in a scanning electron microscope to characterize defects in III-V/Si heteroexpitaxial thin films is described. This method yields similar results to plan-view transmission electron microscopy, but in significantly less time due to lack of required sample preparation.

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Cite this Article

Deitz, J. I., Carnevale, S. D., Ringel, S. A., McComb, D. W., Grassman, T. J. Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization. J. Vis. Exp. (101), e52745, doi:10.3791/52745 (2015).

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