Solvents are standard semiconductor or research grade. Vendor is not important for the experimental outcome.
Reactive ion etch gases and thermal annealing gases are high purity grade. Vendor is not important for the experimental outcome.
EQUIPMENT
Ultrasonic cleaner
Cole-Palmer
EW-08849-00
Low power
Micropipette
Rainin
PR-200
Metered, disposal tips
Reactive ion etcher
SemiGroup
RIE 1000 TP
Other vendors also used with different process parameters
Mask aligner
Karl Suss
MJB3
Other vendors also used with different process parameters
UV ozone cleaner
Jelight
Model 42
Other vendors also used with different process parameters
E-beam evaporator
CVC
SC-6000
Other vendors also used with different process parameters
* Manufacturers and product names are given solely for completeness. These specific citations neither constitute an endorsement of the product by NIST nor imply that similar products from other companies would be less suitable.
Herrero, A. M., Blanchard, P. T., Bertness, K. A. Analysis of Contact Interfaces for Single GaN Nanowire Devices. J. Vis. Exp. (81), e50738, doi:10.3791/50738 (2013).