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고처리량 대규모 시료 검사를 위한 Quattro-Parallel Cantilever 어레이를 사용한 Active Probe Atomic Force Microscopy
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고처리량 대규모 시료 검사를 위한 Quattro-Parallel Cantilever 어레이를 사용한 Active Probe Atomic Force Microscopy
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01:24 min
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June 13, 2023
DOI:
1Mechatronics Research Lab, Department of Mechanical Engineering,Massachusetts Institute of Technology, 2Mechatronics Group, Department of Mechanical Engineering,Ilmenau University of Technology, 3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology,Ilmenau University of Technology, 5nano analytik GmbH
Tags
Active ProbeAtomic Force MicroscopyCantilever ArraysHigh-throughputLarge-scale Sample InspectionScanning Probe MicroscopyMEMS ProbesPiezoresistive SensorsThermomechanical ActuatorsParallel SPM ImagingHigh-speed Multichannel ElectronicsNanoscale Surface StudiesNanofabricated StructuresSemiconductor WafersData-driven Post-processingDefect Detection
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Cite this Article
Xia, F., Youcef-Toumi, K., Sattel, T., Manske, E., Rangelow, I. W. Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection. J. Vis. Exp. (196), e65210, doi:10.3791/65210 (2023).
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