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Mg₃N₂ 및 Zn 3 N₂ 박막의 플라즈마 보조 분자 빔 에피택시 성장

JoVE Journal
Engenharia
Author Produced

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JoVE Journal Engenharia

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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Mg₃N₂ 및 Zn 3 N₂ 박막의 플라즈마 보조 분자 빔 에피택시 성장

7,380 Views

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13:05 min

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May 11, 2019

DOI:

10.3791/59415-v

DOI:

10.3791/59415-v

•

13:05 min

May 11, 2019

•

4 Views

Peng Wu, Thomas Tiedje

¹Department of Electrical and Computer Engineering,University of Victoria

Tags

Plasma-assisted Molecular Beam Epitaxy Mg3N2 Zn3N2 II-V Compound Semiconductors Anti-bixbyite Crystal Structure MBE Growth MgO Substrate High-temperature Annealing RHEED Quartz Crystal Microbalance Sample Degassing Sample Transfer

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