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Crescita Epitaxy del fascio molecolare assistita dal plasma di Mg3N2 en 3N2 Thin Films
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JoVE Journal Engenharia
Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films
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Crescita Epitaxy del fascio molecolare assistita dal plasma di Mg3N2 en 3N2 Thin Films

7,393 Views

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13:05 min

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May 11, 2019

DOI:

10.3791/59415-v

DOI:
10.3791/59415-v

•

13:05 min
May 11, 2019

•

4 Views
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1Department of Electrical and Computer Engineering,University of Victoria

Summary

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Questo articolo descrive la crescita delle pellicole epitassiali di Mg3N2 e n3N2 sui substrati MgO mediante epitassia molecolare assistita da plasma con gas N2 come fonte di azoto e monitoraggio della crescita ottica.

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Cite this Article

Wu, P., Tiedje, T. Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films. J. Vis. Exp. (147), e59415, doi:10.3791/59415 (2019).

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