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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films Plasma-
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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films Plasma-
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May 11, 2019
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Cet article décrit la croissance des films épitaxiaux de Mg3N2 et Zn3N2 sur les substrats MgO par épitaxie de faisceau moléculaire assistée par plasma avec le gaz N2 comme source d'azote et surveillance optique de la croissance.
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Wu, P., Tiedje, T. Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films. J. Vis. Exp. (147), e59415, doi:10.3791/59415 (2019).
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