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用透射显微技术制备氮化硅薄膜磁性纳米结构的研究

JoVE Journal
Engenharia

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JoVE Journal Engenharia

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

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用透射显微技术制备氮化硅薄膜磁性纳米结构的研究

DOI:

10.3791/57817-v

•

06:27 min

•

July 02, 2018

•

Meena Dhankhar, Marek Vaňatka, Michal Urbanek

¹CEITEC BUT,Brno University of Technology

Capítulos

00:04Título
00:40Substrate Preparation, Spin Coating, and Electron-beam Lithography
01:52Chemical Development and Electron Beam Evaporation
03:08Lift-off
03:36LTEM Imaging
04:41Results: Transmission Electron Microscopy of Magnetic Nanostructures on Silicon Nitride Membranes
05:45Conclusion

Summary

Tadução automática

提出了一种适用于透射电镜 (TEM) 和磁透射 x 射线显微术 (MTXM) 研究的磁涡流成形磁性微纳米结构的制备方法。

Tags

Keywords: Magnetic Nanostructures Silicon Nitride Membranes Transmission Microscopy Electron Beam Lithography Electron Beam Evaporation Permalloy Deposition Lift-off Process

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