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用光刻胶喷涂和柔性掩制备医用注射用针尖上的微细电极
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Neurociência
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JoVE Journal Neurociência
Fabrication of Fine Electrodes on the Tip of Hypodermic Needle Using Photoresist Spray Coating and Flexible Photomask for Biomedical Applications
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用光刻胶喷涂和柔性掩制备医用注射用针尖上的微细电极

DOI:
10.3791/56622-v

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08:15 min

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November 28, 2017

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, ,
1Department of Biomedical Science and Engineering,Gwangju Institute of Science and Technology (GIST), 2School of Mechanical Engineering,Gwangju Institute of Science and Technology (GIST)

Capítulos

  • 00:05Título
  • 00:50Needle Preparation: Insulation, Sputtering, and Spray Coating
  • 02:59UV Exposure and Developing
  • 04:24Chromium/Gold Wet Etching and Removal of Residual Photoresist and Passivation
  • 05:44Results: Fine Electrode Fabrication
  • 07:33Conclusion

Summary

Tadução automática

Tadução automática

指电极的制作方法 (间隙和宽度:20 µm) 在皮下针 (直径: 720 µm) 是使用喷雾涂层和柔性膜掩在光刻过程中演示。

Tags

FabricationFine ElectrodesHypodermic NeedlePhotoresistSpray CoatingFlexible PhotomaskBiomedical ApplicationsMicro Diode SensorDrug DeliveryBiopsySurgeryCauterizing ElectrophotometerHeat Shrink TubeSputteringChromiumGoldSoft BakingPhotolithographyAlignmentCCD Display Monitor

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